Vacuum technology for the clean room

Schmalz products can be used in almost every class of cleanroom. They have been tested and certified in collaboration with prestigious institutes. This certification is based on a variety of regulations and official standards.

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Schmalz GmbH
Eigentalstrasse 1
8309 Nürensdorf
Switzerland

T: +41 44 888 75 25
schmalz@schmalz.ch
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The components that have been certified for use in cleanrooms include many of our wide range of vacuum technology products. These can thus be used to cater to a large number of different process requirements. The test results show that most of our products can be used in very clean work environments (up to Class 1 in accordance with DIN EN ISO 14644-1) without the need for any additional measures.

When choosing a product, it is essential to bear in mind exactly where in the cleanroom it will be used so that you can interpret the requirements correctly. In a clean area with a laminar airflow, for example, the required ISO class will not need to be complied with at all points. Due to the straight-line vertical airflow, particle emission sources that are located either under or a certain distance away from the workpiece will usually have only a minimal impact on the workpiece.

Example Illustration of the Cleanroom Compliance Requirement for Equipment Depending on its Installation Location Within the IO Class 3 Cleanroom


In a cleanroom, a variety of measures (ventilation technology, employee clothing, choice of materials and equipment, etc.) are used to control the size and quantity of airborne particles so that they do not exceed a predefined limit. The purpose of this is to ensure compliance with various protection objectives. Depending on the application in question, these may relate to the protection of products and processes (product protection) or that of people and the environment (personal protection).

Scale comparison of potentially occurring airborne particles:

  Ions Molecules Macromolecules Microparticles Macroparticles
Visible with Scanning electron microscope (SEM) Microscope Naked eye
Examples

Atomic radius

Metal ions

Sugar

Herbicides

Soot

Viruses

Tobacco smokeh

Bacteria

Red blood cells

Pollen

Sand

Human hair

Mist

Size [µm (LOG)] 0,001 0,01 0,1-1,0 10 100-1000

 

The established standard for cleanroom definition based on the size and quantity of the particles therein is DIN EN ISO 14644-1. This was originally based on US Federal Standard 209E, which was used internationally within the industry for many years but was officially declared no longer valid in November 2001.

Comparison of Class Thresholds Between DIN EN ISO 14644-1 and US Federal Standard 209E:

ISO-class Calculated class threshold G (particles per cu ft) for certain vertical size ranges (rounded values) according to DIN EN ISO 14644-1

 

US Federal Standard 209E

  ≥ 0,1 µm ≥ 0,2 µmv ≥ 0,3 µm ≥ 0,5 µm ≥ 1,0 µm ≥ 5,0 µm  
1 0,3 * * * * * -
2 3 1 * * * * -
3 28 7 3 1 * * 1
4 283 67 29 10 2 * 10
5 2.832 671 289 100 24 1 100
6 28.321 6.712 2.889 997 236 8 1000
7 * * * 9.967 2.356 83 10000
8 * * * 99.674 23.559 830 100000
9 * * * 996.744 235.594 8.298 -

 

The Ultraclean Technology and Micromanufacturing department at the Fraunhofer Institute for Manufacturing Engineering and Automation (IPA) in Stuttgart independently tests equipment and materials to determine their suitability for use in cleanrooms and cleanliness rooms. These tests are carried out in a cleanroom that is ten times cleaner than a Class 1 cleanroom in accordance with DIN EN ISO 14644-1. As a result, the systems and/or materials are certified with a TESTED DEVICE® or CSM® test mark. The Institute is well-equipped for this work, with over 30 years of experience and expertise in the field of suitability for use in cleanrooms and cleanliness rooms.

Schmalz products can be used in almost every class of cleanroom. They have been tested and certified in collaboration with prestigious institutes. This certification is based on a variety of regulations and official standards. 

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