Productos para la fabricación de obleas

Vacuum Technology for Wafer Manufacturing

Wafers are made from monocrystalline or polycrystalline silicon ingots. These ingots are sawed into approx. 160 µm wafers using a saw wire. Afterwards the wafers are cleaned in wet chemical processes in various basins, separated and prepared for the processing to cells.

Grippers from Schmalz are used in the individual process steps to stack, buffer , fix and position the wafers with minimum cylce times and minimum breakage rates. 

Requirements for Vacuum Technology

High output quantities
Wafer manufacturing requires cycle times of less than one second. Because of the high acceleration rates, the grippers must apply high holding and shear forces. What’s more, using the wafer gripper SWGm can integreate inspection and testing tasks during handling by using the optional integrated sensors.

Low breakage rates
The breakage rate of the process significantly affects the output quantities. For that reason, there is a high focus on handling the wafers as gently as possible. Schmalz’ wafer gripper SWGm enables minimum breakage rates compared to other handling technologies. The large contact surface and low vacuum level mean that the wafer gripper generates only minimum surface pressure, making it particularly gentle.

Contamination-free handling
Contamination of the wafer surfaces must be avoided in all processes throughout the production chain. The wafer gripper SWGm with a contact surface made of contamination-free PEEK material is the optimal solution. Suction cups made oft he markless material HT1, can also be used in wafer manufacturing.

Separating the wafers
Separating the wafers places high demands on the gripping technology. The floating suction cup SBS generates a high flow rate, which is used to achieve a larger engagement distance to separate the wafers. The optional floating suction cup modules SBSm, which can be integrated into the wafer gripper SWGm, allow the advantages of the wafer gripper to be combined with the engagement distance of floating suction cups.

Handling wafers in wet bench applications
The wafer gripper SWGm wet was developed especially for handling wet wafers. The special positioning and dimensioning of the suction points allows wet wafers to be moved securely in industrial etching and cleaning processes without drying out the wafers‘ surface.

Contacto

Schmalz Inc.
5850 Oak Forest Drive
Raleigh NC 27616
Estados Unidos de América

Tel. +1 919 713-0880
Fax +1 919 713-0883
schmalz@schmalz.us
Tarjeta de visita

Productos para la fabricación de obleas

Garras para obleas SWGm

  • Dimensiones: 125 x 125 mm y 156 x 156 mm
  • Modelo básico con escape axial o lateral
  • Material superficie de ventosa: PEEK

Módulo de ventosa flotante SBSm

  • Salto de altura: hasta 12,3 mm
  • Fuerza de retención: 1,3 N

Consulte el producto

Ventosas flotantes SBS

  • Diámetro: 20 a 120 mm
  • Fuerza retención: 2,0 a 104,0 N
  • Tampón de elastómero casi sin huellas en la cara inferior de la ventosa

Ventosas planas SGPN

  • Diámetro: 15 a 40 mm
  • Material: FPM, HT1, NK, SI
  • Ventosa insertada en la boquilla

Ventosas de fuelle FG19

  • Diámetro: 19 mm
  • Material: HT1, NK, SI
  • Ventosa encajada en la boquilla

Consulte el producto

Eyectores compactos SCPi Solar

  • Capacidad de aspiración hasta 145 l/min
  • Máx. vacío 51,5%
  • Función de ahorro de aire y IO-Link integrado